HUA YANG PRECISION MACHINERY CO., LTD.

ABOUT US
PRODUCT

Automated Optical Inspection

Equipment-Reticle

Equipment-FPD

Equipment-Wafer

Module-FPD

Module-Semiconductor

Automation solution

Semiconductor equipment
CONTACT US
ENGLISH 繁體中文

繁體中文
ENGLISH 繁體中文

INDEX
PRODUCT
Automated Optical Inspection
Equipment-Reticle

Automated Optical Inspection
Automation solution
1. Semiconductor equipment

EUV Mask AOI Aurora-EL

EUV Mask AOI Aurora-EL

Pellicle side：particle,pinhole
Through-pellicle inspection：Particle

Feature

Pellicle side

Back

Add. No. 56, Lane 686, Zhongzheng Road, Xinhua District, Tainan City 712, Taiwan (R.O.C.)

Tel. +886-6-2532626

Fax. +886-6-2438417

ABOUT US
PRODUCTION
CONTACT US

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